Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
- AZ1000, Single Stage Regulator, Low to Intermediate Flow w/Optional Bonnet Port
- AZ1500, Single Stage Regulator for Ultra High Purity, Low Flow (Tied-diaphragm)
- AZ1400T, Single Stage Regulator for Ultra High Purity, Intermediate Flow (Tied-diaphragm
- AZ1300, Single Stage Regulator for Ultra High Purity, High Flow
- AZ1200, Single Stage Regulator, High Flow (Tied-diaphragm)
- AZ9200, Single Stage Regulator for Ultra High Purity, High Flow (Tied-diaphragm)
- AZ1100, Single Stage Regulator for Delivery of Sub-atmospheric Pressure