XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection and Release

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• One-touch connection & release, requires no tools
• Lightweight & compact
• Auto switch capable
• XLAQ: single acting, normally closed, bellows seal
• XLAQ: flange sizes are 16, 25, 40, 50
• XLDQ: 2-step control, single acting
• XLDQ: flange sizes are 40, 50

Product Catalog

SERIES CATALOG