XLAV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve

Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The bellows assembly can be replaced, reducing maintenance costs and waste materials.

• Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
• High corrosion resistance to fluorine gas
• Minimal outgassing
• Minimal contamination from heavy metals
• Optional heaters
• Optional position sensors
• Optional oxalic acid anodizing for internals

Product Catalog

SERIES CATALOG