High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- XLA, Aluminum High Vacuum Angle Valve, Normally Closed/Bellows Seal
- XLAV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
- XLG, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal
- XLD, Aluminum High Vacuum Angle Valve, Air Operated
- XLDV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
- XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal
- XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve
- XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance
- XLH, High Vacuum Manual Angle Valve, Bellows Seal
- XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
- XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection and Release
- XLJ, Vacuum Angle Valve w/Release Valve